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Frequency Crystal Sensor |
Product Application
Used for crystal monitor system.
The monitor system can catch the evaporation rate by dint of this crystal.
Characteristic
1. This crystal can take stability frequency and detect the shift of evaporation amount.
2. This crystal has been steady for temperature variation because of using AT cut crystals.
3. You can request for frequency extent.
4. We can make your frequency spec. Please request to us if you need special spec.
*We are using the special equipment for measure frequency, resistance amount and curvature. |
Our usual products’ specification are as follows:
| Marking Frequency |
5.000MHz(Foundation mode) |
6.000MHz(Foundation mode) |
| Nominal Frequency |
4.950MHz |
5.982MHz |
| Circumference |
Φ12.4(+0.05, -0.10) |
Φ14.0(±0.02) |
| Electrode Material |
Gold or Silver(Inner layer: Chrome) |
Contouring |
Round Plano-convex |
| Cutting angle |
3°03′±2 |
Surface Roughness |
#1000 |
| Touch place |
Plano-convex side |
Cutting way |
AT-cut |
Performance
| Marking Frequency |
5.000MHz(Foundation mode) |
6.000MHz(Foundation mode) |
| Resonance Resistance |
< 25Ω |
| Frequency Adjustment for temperature variation |
At 25℃~80℃ 0~-4ppm
(At 55℃,the frequency adjustment tolerance is 4ppm±1ppm and the alternation range is about 20Hz±5Hz with the average frequency variety at 0.67Hz/℃) |
| Touch Resistance amount |
500MΩ以上(DC100V±15V) |
| Principal/secondary Vibration |
The attenuation of secondary vibration is 2.5dB
faster than principal vibration. |
Appearance and Packaging
| Appearance |
Pure, scarless and pollution free. |
| Packaging |
As requested from you. 5pcs/box, 10pcs/box, 50pcs/box |
The following is a guideline for the application appropriate crystal:
NEXTECK RECOMMENDS “GOLD FOR LOW STRESS METALIZING”
The most common thin film process is the deposition of aluminum, gold, copper, and silver to provide electrical contacts or optical reflectance. These films are relatively free of tensile or compressive stress and are deposited at room temperature. They are soft and easily scratched, but do not tend to flake off or damage substrates.
These films can be monitored using gold, silver, or alloy electrode crystals. We routinely deposit over 60,000 Angstroms of gold and 500,000 Angstroms of aluminum on 6 MHz crystals before changing to a new crystal. Select the corresponding crystal for your system:
| Gold Part No . |
| Inficon |
QI8010 |
| Intellemetrics |
QI8010F |
| Sloan |
QS3950 |
| Balzers |
QB104G |
NEXTECK RECOMMENDS “SILVER OR ALLOY FOR YOUR HIGH STRESS METALIZING”
Thin films of nickel, chromium, molybdenum, zirconium, nichrome, titanium, and inconel develop high stresses when deposited. These films often flake or crack at a thickness above 1,000 Angstroms, and in some cases, can even craze or crack the substrates they are coating. This stress is quickly transmitted to the quartz crystal and manifests as a sudden rate jump or a series of rapidly occurring positive and negative rate spikes. In some processes this can be tolerated, but in others, may negatively impact evaporation source control.
The best choice for these materials is either a silver or alloy electrode crystal. The electrode compliance or yielding tends to reduce the film stress and diminish, and often eliminate, the erratic rate changes. Select the corresponding silver or alloy crystals for your system:
| |
Silver |
Alloy |
| Inficon |
QI8009 |
QI8008 |
| Intellemetrics |
QI8009F |
QI8008F |
| Sloan |
QS3950 |
QS3954 |
| Balzers |
QB104S |
QB104A |
RECOMMENDS “ALLOY FOR DIELECTRIC MATERIAL OPTICAL COATING”
Dielectric materials, including magnesium fluoride, titanium dioxide, silicon monoxide and dioxide, aluminum oxide, and thorium fluoride, are frequently used for their optical transmission or reflectance properties and are the most difficult to monitor. These films do not adhere well unless the substrate is heated to temperatures of 200 degrees Centigrade or more. When deposited on water-cooled crystals, these films exhibit tremendous stress upon condensation and can easily cause crystal failure within the first 1,000 Angstroms of coating.
The best choice for these materials is an alloy electrode crystal. Positive and negative rate spikes can be reduced dramatically. Laboratory results have also shown a usable life increase of 100% for magnesium fluoride and silicon dioxide. In most cases crystal life can also be extended by raising the sensor head cooling water temperature to 50 degrees Centigrade (from the normal 20 degrees Centigrade). Select the corresponding alloy crystal for your system:
| Alloy Part No |
Alloy Part No |
| Inficon |
QI8008 |
| Intellemetrics |
QI8008F |
| Sloan |
QS3954 |
| Balzers |
QB104A |
Quartz Crystals Alloy Data
Quartz Crystals QI8008
| Physical Characteristics |
| Sensor material |
Single crystal alpha quartz |
| Angle of cut 1 |
35 degrees 15’ (AT) |
| Contour |
3 diopter Plano-Convex |
| Surface Roughness |
10 micron |
| Diameter |
0.1550” (13.97 mm) |
| Electrode |
Silver aluminum alloy/chromium |
| Electrical Characteristics 2 |
QI8008 |
Resonant frequency (MHz)
|
5.975-5.993 |
| Resistance at Resonance |
<15 Ohms |
| Contact Resistance |
<15 Ohms |
Notes:
1. The true angle of cut varies as a function of the contour. The true angle for this configuration crystal is actually 35 degrees 16 minutes.
2. Our values are actual quality assurance specifications. A detailed histogram of lot measurements is available on request.
Note: We believe that high-level inspections are required to maintain the high quality crystal production demanded by our end users. In addition to the electrical and physical parameters listed above measures motional capacitance and inductance, spurious resonance separation, and static capacitance to help track subtle changes in incoming quartz quality and in the production process.
Silver Quartz Crystals QI8009 Specifications
| Physical Characteristics |
QI8009 |
| Sensor material |
Single crystal alpha quartz |
| Angle of cut 1 |
35 degrees 15’ (AT) |
| Contour |
3 diopter Plano-Convex |
| Surface Roughness |
10 micron |
| Diameter |
0.550” (13.97 mm) |
| Electrode |
Silver/chromium |
| Electrical Characteristics 2 |
QI8009 |
Resonant frequency (MHz)
|
5.975-5.993 |
| Resistance at Resonance |
<15 Ohms |
| Contact Resistance |
<20 Ohms |
Notes:
1. The true angle of cut varies as a function of the contour. The true angle for this configuration crystal is actually 35 degrees 16 minutes.
2. The electrical characteristics for values are actual quality assurance specifications. A detailed histogram of lot measurements is available on request.
Note: We believe that high-level inspections are required to maintain the high quality crystal production demanded by our end users. In addition to the electrical and physical parameters listed above, measures motional capacitance and inductance, spurious resonance separation, and static capacitance to help track subtle changes in incoming quartz quality and in the production process.
Gold Quartz Crystals QI8010 Specifications
| Physical Characteristics |
QI8010 |
| Sensor material |
Single crystal alpha quartz |
| Angle of cut 1 |
35 degrees 15’ (AT) |
| Contour |
3 diopter Plano-Convex |
| Surface Roughness |
10 micron |
| Diameter |
0.550” (13.97 mm) |
| Electrode |
Gold/chromium |
| Electrical Characteristics 2 |
QI8010 |
Resonant frequency (MHz)
|
5.975-5.993 |
| Resistance at Resonance |
<15 Ohms |
| Contact Resistance |
<20 Ohms |
Notes:
1. The true angle of cut varies as a function of the contour. The true angle for this configuration crystal is actually 35 degrees 16 minutes
2. The electrical characteristics for our values are actual quality assurance specifications. A detailed histogram of lot measurements is available on request.
Note: We believe that high-level inspections are required to maintain the high quality crystal production demanded by our end users. In addition to the electrical and physical parameters listed above, measures motional capacitance and inductance, spurious resonance separation, and static capacitance to help track subtle changes in incoming quartz quality and in the production process.
How to Improve Crystal Performance
- Keep the crystal surface clean. Avoid any physical contact with the center of the crystal during handling and blow off any particulates using dry and filtered air or dry nitrogen. Keeping the crystal surface clean lowers resistance and improves film adhesion.
- Maintain good electrical contact with the crystal. Keep cables in good condition and snug to the sensor and feedthrough. Periodically inspect the finger spring contacts in the sensor head and adjust or replace when necessary.
- Keep the sensor head cap clean. Material buildup around the opening can cause mechanical coupling and damping if it contacts the crystal.
- Maintain the crystal sensor water temperature at a minimum of 25When using a ciruculating chiller with heating capability, run the sensor at 50for high stress coatings. The higher temperature reduces stress as the coating deposits and also improves film/crystal adhesion.
- Use Alloy or Longer Life Gold coated crystals in place of Gold for high stress material depositions. Alloy and Longer Life Gold electrodes yield, dissipating film stress before it reaches the crystal surface.
- Shield the crystal from direct exposure to radiant heat sources or glow.
- Minimize source “spitting” during evaporation. Large pieces of evaporant (“splatters”) dramatically increase the resistance of the crystal and lead to erratic rate function or early failure. Prevent crystal failure caused by material ejection during deposition with proper source rate control, proper distance from the crystal to the source, and proper type of source (e.g. Drumheller type for Silicon Monoxide).
- The SEM images below show evaporatant splatter (images 1 and 2) and a fingerprint (image 3) on the surface of a crystal. Evaporant splatter and fingerprints can result in erratic (positive and/or negative) rate changes and even crystal failure.

The second SEM image below is magnified 2,000x, and shows the above evaporatant splatter on the surface of the crystal:

The image below shows a fingerpint on the surface of a crystal:

Effect of Electrode Metal on
Quartz Crystal Sensor Performance for Gold, Longer Life Gold, Alloy and Silver.
The type of metal used for the contact electrode on a quartz crystal sensor has a pronounced influence on the crystal’s ability to measure film thickness. As a result, we provide four standard crystal:
1. Gold - QB104G Quartz Crystals Gold, 5 MHz, QI8010 and Quartz Crystals Gold, 6 MHz are the mostly widely known crystal electrode material. It offers low contact resistance, very high chemical stability, and is easy to deposit. Typically, gold crystals are used for low-stress metal depositions such as gold, silver, and/or copper. With gold it is possible to get frequency shifts of up to 1 Megahertz without adverse effects. However, gold electrodes are relatively inflexible, transmitting stresses from deposited films to the underlying quartz. Transmitted stresses may result in frequency jumps and crystal instability.
2. Longer Life Gold - QB 104GL crystals 5 MHz.are exlcusive to offer longer life than standard Gold crystals. Our proprietary process for longer life gold combines the low contact resistance and high chemical stability of gold crystals with the plastic yielding qualities of alloy crystals to produce a superior, longer life gold crystal. We recommend our longer life gold for anti-reflective coatings and semiconductor processes to dissipate the stresses caused by dielectric and high stress material depositions. Laboratory experiments have shown over 200% increase in crystal life with deposited magnesium fluroride on gold longer life.
3. Alloy - Qi8008, QI 8008F, QS 3954 andQN104A an aluminum-silver composition of -is the best electrode for high-stress material depositions including; silicon monoxide, silicon dioxide, magnesium fluroride, and titatium dioxide. Deposited high-stress materials often cause erratic crystal performance produced by high tensile or compressive stresses. These stresses cause bending of the quartz and subsequent frequency shifts.Alloy dissipates the stress of the deposited film by plastic yielding or flowing. Long before the compressive or tensile forces cause the crystal to bend the electrode will "give," dissipating the stress. This results in a much more stable crystal with a longer period of steady, jump-free oscillation. Laboratory experiments have shown as much as a 400% increase in crystal life with deposited silicon dioxide on alloy.
4. Silver - Qi8009, QI 8009F, QS 3950 andQN104S -5 MHz. are an excellent all-around electrode material. Silver has a low contact resistance and exhibits some degree of plastic yielding. However, silver tends to tarnish in the presence of atmospheric sulfides. The tarnish will increase contact resistance and decrease the adherence of film deposits on the crystal.
Quartz Crystals Shelf Life
We suggest the following guidelines regarding the “shelf life” of quartz crystal sensors and the environmental conditions required for storing quartz crystals. Shelf life refers to the time a device can be safely stored without harmful effects to its performance.
Quartz crystals are surface active and frequency based devices. Their self life generally applies to any changes in their electrode chemical composition and resonant frequency. Therefore, the storage environment of crystals will dictate the shelf life of the sensors. By following the guidelines below, quartz crystals can be stored almost indefinitely depending on the electrode material selected. The QI8010 gold crystal is the most stable due to the inert nature of the gold electrode. The QI8008 and QI8009 are slightly more sensitive to chemical exposure and moisture due to their respective alloy and silver electrodes.
Temperature: Standard room temperature between 20 and 24 degrees C.
Humidity: Standard room humidity between 40% and 60%.
Chemical Exposure: Do not store crystals in the presence of volatile materials, oils, sulfur, halides, ozone, iodine and oxidizing agents.
Particulate Exposure: Do not store crystals in particulate laden environments. If this cannot be avoided seal containers properly.
Mechanical Exposure: Do not store crystals in areas with excessive mechanical vibrations.
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